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Theses

SL-DRT-24-0315

Published on 7 December 2023
SL-DRT-24-0315
Research fieldEmerging materials and processes for nanotechnologies and microelectronics

Domaine-S

ThemeTechnological challenges

Theme-S

Field
Emerging materials and processes for nanotechnologies and microelectronics Technological challenges DRT DPFT SPAT LGRA Grenoble
Title
Towards sustainable electronics: impact and understanding of the substitution of high GWP gases on plasma etching processes
Abstract
To address environmental concerns in the microelectronics industry, CEA-LETI is committed to an eco-innovation approach [1]. In this context, the development of eco-responsible processes that reduce PerFluoro-Carbon (PFC) emissions is crucial [2]. Plasma etching processes are a major emitter of PFCs because they traditionally use high GWP gases. The aim of this thesis will be to develop plasma etching processes on 300mm substrates by replacing fluorinated gases such as NF3, SF6 and CF4 with high GWP by F2 (GWP ~0). This work will involve understanding the changes induced in the etching processes for advanced devices. The dual challenge is to reduce the environmental impact while guaranteeing the high performance of these devices. To achieve this objective, you will implement new F2-based mixtures on targeted applications for etching materials and cleaning reactors. You will provide comparative data on the performance of these new processes compared with reference processes in terms of etching results and the level of abatement of reaction by-products. You will be based at the CEA-LETI Etching Laboratory. The work, which will be predominantly experimental on CEA-Leti's 300mm platform (see : https://www.youtube.com/watch?v=on1NH08AZfE), will benefit from the state-of-the-art process equipment and characterisation resources of the Nanotechnologies platform. The scientific and industrial interest of the subject guarantees that your work will be showcased in international communications. If you want your research to have an impact on society, apply now!
Formation
M2 ou Ingénieur en Sciences et Génie des Matériaux / Plasma Technological Research
Contact person
BOIXADERAS Christelle CEA DRT/DPFT//LGRA 17 rue des Martyrs 38000 Grenoble 0438780637 christelle.boixaderas@cea.fr
University/ graduate school
Université Grenoble Alpes Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Thesis supervisor
DRT/DPFT/SPAT/LGRA
Location
Département des Plateformes Technologiques (LETI) Service des procédés de Patterning Laboratoire Gravure
Start1/10/2024

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